Specifications
| Dimensions: 3.5mm x 3.5mm |
| Accuracy: ±5% of measured value |
| Flow range: 0.001 slm to over 500 slm in bypass configuration |
| Type: MEMS Gas Flow Sensor |
| Dimensions: 3.5mm x 3.5mm |
| Accuracy: ±5% of measured value |
| Flow range: 0.001 slm to over 500 slm in bypass configuration |
| Type: MEMS Gas Flow Sensor |
